Measurement Technology for Micro-Nanometer Devices
Zongmin Ma, Dachao Li, Jingdong Chen, et al.
EPUB
128,99 €
Naturwissenschaften, Medizin, Informatik, Technik / Elektronik, Elektrotechnik, Nachrichtentechnik
Beschreibung
A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale * Highlights the advanced research work from industry and academia in micro-nano devices test technology * Written at both introductory and advanced levels, provides the fundamentals and theories * Focuses on the measurement techniques for characterizing MEMS/NEMS devices
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Schlagwörter
Optical and Non-Linear Optical Materials, Control Process & Measurements, Optische u. Nichtlineare Optische Materialien, Maschinenbau, Mess- u. Regeltechnik, Materials Science, Electrical & Electronics Engineering, Nanoelektronik, MEMS, Mikroelektronik, Mechanical Engineering, Materialwissenschaften, Elektrotechnik u. Elektronik